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Related Experiment Video

Updated: Jun 12, 2026

Photoelectron Imaging of Anions Illustrated by 310 Nm Detachment of F−
06:53

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Published on: July 27, 2018

Characterizing voltage contrast in photoelectron emission microscopy.

V K Sangwan1, V W Ballarotto, K Siegrist

  • 1Department of Physics, University of Maryland, College Park, Maryland 20742, USA.

Journal of Microscopy
|June 29, 2010
PubMed
Summary
This summary is machine-generated.

This study introduces a non-destructive method using photoelectron emission microscopy to measure voltage contrast. The technique accurately probes local voltage in microelectronic devices, validated by electrostatic models.

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Last Updated: Jun 12, 2026

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Area of Science:

  • Materials Science
  • Physics
  • Electrical Engineering

Background:

  • Characterizing voltage in microelectronic devices is crucial for performance and reliability.
  • Existing methods may be destructive or lack spatial resolution.
  • Photoelectron Emission Microscopy (PEEM) offers potential for non-invasive analysis.

Purpose of the Study:

  • To develop and validate a non-destructive technique for voltage contrast measurement using PEEM.
  • To quantify the accuracy of PEEM for probing local voltage information.
  • To assess the feasibility of PEEM for microelectronic device analysis.

Main Methods:

  • Utilized a non-destructive technique with PEEM.
  • Employed electrically isolated metal lines as test samples.
  • Quantified voltage contrast by comparing experimental data with two electrostatic models.

Main Results:

  • Demonstrated successful acquisition of voltage contrast information using PEEM.
  • Showed close agreement between measured and calculated voltage contrast.
  • Validated the non-intrusive nature of the PEEM technique.

Conclusions:

  • PEEM-based voltage contrast is a viable non-destructive method for analyzing microelectronic devices.
  • The technique provides accurate local voltage information.
  • This approach enhances non-invasive characterization capabilities in semiconductor research.