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Updated: Jun 11, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Wavefront aberration correction analysis of an all-holographic straight-line scanner
Abstract:
This paper describes an all-holographic straight-line scanner consisting only of a holographic disk and a holographic lens. Scanning beam aberration correction was extensively analyzed using diffraction theory. A new technique for simultaneously optimizing the phase transfer functions of these two holograms is proposed, and a method to construct these two holograms using holographic recording is discussed. This technique led to a compact, high resolution holographic line scanner with a 1/e(2) scanning beam spot size of 100-120 microm for a scanning width of 252 mm. The radius of the disk at the center of illumination is only 28 mm.

