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Updated: Jun 11, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Evolution of thermochromism during oxidation of evaporated vanadium films
Abstract:
Thin vanadium oxide films were made by vacuum evaporation followed by the annealing posttreatment in the presence of air. The thickness increased by a factor as large as approximately 2.3 on oxidation. Electron diffractograms indicated a bcc ? monoclinic transformation during the annealing, and electron micrographs showed pronounced grain growth. Temperature-dependent electrical conductivity as well as spectral transmittance was measured vs annealing time. At an initial thickness of 0.12 microm, it took a few hours to establish VO(2) films with a well defined semiconductor-metal transition and concomitant thermochromic switching at approximately 57 degrees C.
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