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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Highly flexible MTF measurement system for tunable micro lenses
Wei Zhang1, Khaled Aljasem, Hans Zappe
1Laboratory for Micro-optics, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany. wei.zhang@imtek.uni-freiburg.de
Optics Express
|July 1, 2010
Summary
We developed a cost-effective method to measure the modulation transfer function (MTF) of tunable micro-lenses across various focal lengths. This technique utilizes a standard optical microscope for efficient lens characterization.
Area of Science:
- Optical Engineering
- Micro-optics Characterization
Background:
- Accurate characterization of micro-lens performance is crucial for optical system design.
- Existing modulation transfer function (MTF) measurement systems can be costly and complex.
Purpose of the Study:
- To present an efficient and low-cost method for measuring the MTF of micro-lenses.
- To enable MTF measurements across a range of focal lengths for tunable micro-lenses.
Main Methods:
- Utilized a conventional optical microscope with optimized lens illumination.
- Developed a novel approach for modulation transfer function (MTF) measurement.
- Correlated results with a commercial MTF measurement system for validation.
Main Results:
- Successfully measured MTF for both fixed-focus and tunable micro-lenses.
- Achieved a resolution of 55 lines/mm for tunable micro-lenses with an 11 mm back focal length.
- Observed a decrease in resolution to 40 lines/mm for a 4 mm back focal length, indicating performance improves with longer focal lengths.
Conclusions:
- The presented MTF measurement approach is efficient, low-cost, and suitable for tunable micro-lenses.
- The method provides reliable data, validated against commercial systems.
- Micro-lens performance, specifically resolution, is dependent on focal length, generally improving with longer focal lengths.
