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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Electron beam excitation assisted optical microscope with ultra-high resolution
Wataru Inami1, Kentaro Nakajima, Atsuo Miyakawa
11Division of Global Research Leaders, Shizuoka University, Johoku, Naka, Hamamatsu, Shizuoka 432-8561, Japan. dwinami@ipc.shizuoka.ac.jp
Optics Express
|July 1, 2010
Summary
We developed a novel electron beam excitation optical microscope with sub-50 nm resolution. This advanced microscopy technique allows real-time observation of dynamic biological processes in diverse environments.
Area of Science:
- Optics and Photonics
- Nanotechnology
- Biophysics
Background:
- Conventional optical microscopy is limited by diffraction, hindering nanoscale visualization.
- Observing dynamic biological processes in native environments remains a challenge.
- Existing near-field scanning optical microscopes have limitations in scan speed and environmental versatility.
Purpose of the Study:
- To introduce and validate a new electron beam excitation assisted optical microscope.
- To achieve resolution beyond the diffraction limit for nanoscale imaging.
- To enable dynamic observation of biological specimens in various settings.
Main Methods:
- Utilizing a focused electron beam to excite a nanometric light source within a luminescent film.
- Developing a scanning system for the nanometric light source.
- Integrating capabilities for measuring optical constants (absorption, refractive index, polarization).
Main Results:
- Demonstrated a resolution exceeding 50 nm.
- Achieved faster scan speeds compared to conventional near-field scanning optical microscopes.
- Successfully observed dynamic behaviors of living biological specimens in air and liquid.
Conclusions:
- The proposed microscope offers high-resolution, real-time imaging of biological dynamics.
- It overcomes environmental limitations of previous techniques.
- Opens new avenues for nanotechnology and nanoscience research.
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