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Updated: Jun 11, 2026

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Patterning of two-dimensional planar lithium niobate architectures on glass surface by laser scanning
Tsuyoshi Honma1, Takayuki Komatsu
1Department of Materials Science and Technology, Nagaoka University of Technology, Kamitomioka 1603-1 Nagaoka, Niigata, 940-2188, Japan. honma@mst.nagaokaut.ac.jp
Abstract:
Two-dimensional planar LiNbO(3) (LN) crystal architectures are patterned on the surface of Li(2)O-Nb(2)O(5)-B(2)O(3)-SiO(2) glass by continuous wave ytterbium YVO(4) fiber laser (wavelength: 1080 nm) irradiations, in which lasers are scanned continuously with narrow steps (pitches: 0.3 and 0.5 microm) and thus with overlaps of laser irradiated parts. For the planar LN crystals (area: 50 microm x 100 microm) patterned by laser scanning with a power of 0.9 W and a speed of 7 microm/s, it is demonstrated from polarized micro-Raman scattering spectra and azimuthal dependence of second harmonic intensities that the c-axis orientation of LN crystals is established along the laser scanning direction. The present study proposes that the laser irradiation technique gives us uniform LN crystal films on the glass surface.

