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Scott M Jobling1, Paul G Kwiat
1Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, 1406 W Green Street, Urbana, IL 61801, USA. jobling2@illinois.edu
This study presents a new method for precise surface metrology using phase measurements and a least-squares algorithm. The technique corrects for system aberrations, enabling accurate surface profiling of optics.
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