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Analysis and identification of phase error in phase measuring profilometry.

Feng Chen1, Xianyu Su, Liqun Xiang

  • 1Department of Opto-electronics, Sichuan University, 24, South Section 1, Yihuan Road, Chengdu, Sichuan, 610065, China.

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Phase measuring profilometry (PMP) accuracy degrades at surface discontinuities due to CCD sampling. Temporal phase unwrapping (TPU) is introduced to effectively identify these abrupt discontinuities, improving measurement precision.

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Area of Science:

  • Optical Metrology
  • Surface Characterization
  • 3D Imaging

Background:

  • Phase Measuring Profilometry (PMP) is susceptible to accuracy degradation at abrupt surface discontinuities.
  • CCD sampling effects introduce significant errors, particularly at sharp transitions.
  • Current methods lack efficiency in identifying these critical surface features.

Purpose of the Study:

  • To analyze phase errors occurring at abrupt discontinuities in PMP.
  • To develop and validate a method for identifying these discontinuities.
  • To enhance the accuracy and reliability of PMP measurements.

Main Methods:

  • Analysis of the relationship between phase, height, and equivalent wavelength.
  • Vectorial representation of phase to understand CCD sampling errors.
  • Introduction of temporal phase unwrapping (TPU) for discontinuity identification.

Main Results:

  • Phase exhibits non-linear behavior with equivalent wavelength at abrupt discontinuities.
  • CCD sampling introduces measurable phase errors.
  • TPU successfully identifies abrupt surface discontinuities.

Conclusions:

  • The proposed method using TPU effectively identifies abrupt discontinuities in PMP.
  • This approach mitigates accuracy loss caused by CCD sampling effects.
  • The findings are validated through computer simulations and experimental results.