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Updated: Jun 11, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Ultrahigh-finesse, low-mode-volume Fabry-Perot microcavity
Andreas Muller1, Edward B Flagg, John R Lawall
1National Institute of Standards and Technology and University of Maryland, Gaithersburg, Maryland 20899, USA. andreas.muller@nist.gov
Abstract:
Ultralow-loss concave micromirrors with radius of curvature below 60 microm were fabricated by laser ablation and reflective coatings. A 10-microm-long microcavity with a mode volume of 40 microm(3) was set up with two such mirrors, and the cavity linewidth was measured both spectrally and temporally. The smallest linewidth obtained was 96 MHz, corresponding to a quality factor of 3.3x10(6) and a finesse in excess of 1.5x10(5). With these parameters, we estimate that a variety of solid-state quantum emitters coupled to the cavity may enter the strong coupling regime.
