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Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays
Xiaoru Li1, Guojun Song, Zhi Peng
1Institute of Polymer Materials, Qingdao University, No. 308 Ningxia Road, Qingdao, 266071 People's Republic of China.
Abstract:
In this work, we report that large area metal nanowire and polymer nanotube arrays were successfully patterned by photolithographic approach using anodic aluminum oxide (AAO) templates. Nanowires were produced by electrochemical deposition, and nanotubes by solution-wetting. The highly ordered patterns of nanowire and nanotube arrays were observed using scanning electron microscopy (SEM) and found to stand free on the substrate. The method is expected to play an important role in the application of microdevices in the future.
