Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays

Xiaoru Li1, Guojun Song, Zhi Peng

  • 1Institute of Polymer Materials, Qingdao University, No. 308 Ningxia Road, Qingdao, 266071 People's Republic of China.

Summary

Large area metal nanowire and polymer nanotube arrays were patterned using anodic aluminum oxide templates. This photolithographic method enables ordered free-standing nanostructures for future microdevices.

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