Small-amplitude dynamic force microscopy using a quartz cantilever with an optical interferometer

K Morita1, Y Sugimoto, Y Sasagawa

  • 1Graduate School of Engineering, Osaka University, Suita, Osaka, Japan.

Nanotechnology
|July 7, 2010
PubMed
Summary

We introduce dynamic force microscopy (DFM) using a quartz cantilever and interferometric sensor. This technique achieves high force sensitivity and atomic resolution imaging, even with a blunt tip, enabling detailed surface analysis.