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Updated: Jun 11, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Towards carbon-nanotube integrated devices: optically controlled parallel integration of single-walled carbon
1Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0511, USA.
Abstract:
Where it starts and where it goes? Controlled integration of single-walled carbon nanotubes (SWNTs) into pre-designed nano-architectures is one of the major challenges to be overcome for extensive scientific research and technological applications. Various serial assembly techniques have been proposed and developed. However, they are still a long way from practical applications due to the drawbacks on reliability, yield and cost. Here we demonstrate a laser-based strategy to achieve parallel integration of SWNTs into pre-designed nano-architectures through an optically controlled in situ growth process. Optical driving forces originated from tip-induced optical near-field enhancement and laser beam polarization were applied in this study to realize the controlled placement of SWNTs at designated sites following wanted orientations on the nanometer scale. Parallel integration of SWNT arrays was achieved by adjusting laser beam diameter to cover interested nano-architectures. The laser-based process suggests an efficient and cost-effective approach for fabricating and integrating SWNT-based devices and circuits.

