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Implementation of a Reference Interferometer for Nanodetection

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Absolute surface metrology by differencing spatially shifted maps from a phase-shifting interferometer.

¹Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA. Eric.E.Bloemhof@jpl.nasa.gov

|July 17, 2010

Summary

This summary is machine-generated.

This study introduces a simple method for absolute surface measurements of precision optics. By measuring an optic in three positions, it eliminates reference surface errors for accurate, absolute surface height data.

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Area of Science:

Optical Engineering
Metrology

Background:

Precision optics surface measurements often rely on Fizeau interferometers with reference surfaces introducing comparable errors.
Existing absolute measurement techniques are complex, requiring numerous measurements and additional optics.

Purpose of the Study:

To present a simple, novel method for achieving absolute surface measurements of precision optics.
To eliminate the need for additional optical components beyond the test surface and a transmission flat/sphere.

Main Methods:

The optic under test is measured in three positions.
Two positions involve small lateral shifts along orthogonal directions.
Phase differences are calculated by subtracting measurements in pairs to cancel reference surface errors.

Main Results:

A grid of absolute surface height differences between neighboring resolution elements is generated.
The method effectively cancels out phase structure in the reference surface.
Full absolute surface recovery is achieved using standard wavefront reconstruction.

Conclusions:

This technique offers a straightforward and effective approach to absolute surface metrology for precision optics.
It simplifies the process by avoiding additional optics and complex setups.
The method provides accurate absolute surface data, crucial for high-precision optical components.