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Updated: Jun 10, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
10:32

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

Published on: January 9, 2014

Controlled positioning of large interfacial nanocavities via stress-engineered void localization

Firat Güder1, Yang Yang, Silvana Goetze

  • 1Nanotechnology Group Institute of Microsystems Engineering (IMTEK), Albert-Ludwigs-University Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany.

Small (Weinheim an Der Bergstrasse, Germany)
|July 17, 2010
PubMed
Summary

No abstract available in PubMed .

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