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Single Plane Illumination Module and Micro-capillary Approach for a Wide-field Microscope
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Published on: August 15, 2014

Small-size microlens characterization by multiwavelength high-resolution interference microscopy.

Myun-Sik Kim1, Toralf Scharf, Hans Peter Herzig

  • 1Optics and Photonics Technology Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Breguet 2, 2000 Neuchâtel, Switzerland. myunsik.kim@epfl.ch

Optics Express
|July 20, 2010
PubMed
Summary
This summary is machine-generated.

We developed immersion high-resolution interference microscopy for characterizing small microlenses. This technique effectively measures focus properties and chromatic behaviors of 20-µm microlenses, overcoming substrate limitations.

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Area of Science:

  • Optical Engineering
  • Microscopy
  • Nanotechnology

Background:

  • Microlens characterization is challenging due to difficulties in applying conventional optical testing methods.
  • Small microlenses on substrates often have back focal planes within the substrate, complicating analysis.
  • Existing characterization techniques are insufficient for small-sized microlenses.

Purpose of the Study:

  • To propose and demonstrate a novel immersion high-resolution interference microscopy technique.
  • To enable accurate characterization of small-size microlenses, particularly those with back focus issues.
  • To investigate the optical properties of microlenses at visible wavelengths.

Main Methods:

  • Immersion high-resolution interference microscopy was employed.
  • The technique was applied to characterize 20-micrometer-diameter microlenses.
  • Measurements were performed at three distinct visible wavelengths.

Main Results:

  • Wavefront investigations were successfully conducted.
  • Actual focus properties of the microlenses were experimentally determined.
  • Chromatic behaviors of the microlenses were analyzed.

Conclusions:

  • Immersion high-resolution interference microscopy is effective for characterizing small microlenses.
  • The method overcomes challenges posed by back focal planes within substrates.
  • Comprehensive optical performance data, including chromatic properties, can be obtained.