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Fabrication of diffractive optical elements on 3-D curved surfaces by capillary force lithography
Dengying Zhang1, Weixing Yu, Taisheng Wang
1Opto-electronic Technology Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, 130033, China.
Optics Express
|July 20, 2010
Summary
Capillary force lithography (CFL) successfully fabricates diffractive optical elements (DOEs) on curved surfaces. This method offers high fidelity and speed, particularly for sub-microscale features.
Area of Science:
- Optics and Materials Science
- Nanotechnology and Microfabrication
Background:
- Fabricating diffractive optical elements (DOEs) on curved surfaces presents significant challenges for conventional methods.
- Replication of micro- and nanoscale features with high fidelity is crucial for advanced optical applications.
Purpose of the Study:
- To demonstrate the fabrication of DOEs on 3D curved surfaces using capillary force lithography (CFL).
- To evaluate the effectiveness of CFL for replicating micro- and nanoscale gratings on concave surfaces.
Main Methods:
- Utilized capillary force lithography (CFL) to replicate diffractive optical elements.
- Fabricated polymer gratings with periods of 20 micrometers and 820 nanometers on concave surfaces.
Main Results:
- Successfully replicated curved gratings with high fidelity and at a relatively fast speed using CFL.
- Observed faster polymer growth rates and closer step heights to the master in sub-microfabrication compared to microfabrication with CFL.
Conclusions:
- CFL is an effective technique for fabricating DOEs on curved surfaces.
- CFL is particularly advantageous for creating sub-microscale and nanoscale features on curved substrates due to enhanced fabrication characteristics.
