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Related Experiment Video

Updated: Jun 10, 2026

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores
09:43

Fine-tuning the Size and Minimizing the Noise of Solid-state Nanopores

Published on: October 31, 2013

Local solid-state modification of nanopore surface charges.

Ronald Kox1, Stella Deheryan, Chang Chen

  • 1IMEC, Kapeldreef 75, 3001, Leuven, Belgium. ronald.kox@imec.be

Nanotechnology
|July 27, 2010
PubMed
Summary
This summary is machine-generated.

Solid-state nanopores offer stable DNA detection. Electron Beam Induced Deposition (EBID) with silicon oxide allows surface tuning and stable charge control for improved nanopore sensing applications.

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Area of Science:

  • Nanotechnology
  • Biophysics
  • Materials Science

Background:

  • Biological nanopores, like alpha-haemolysin, show promise for DNA detection but suffer from poor chemical stability.
  • Solid-state nanopores are being developed as a stable alternative, but fabrication methods often require specialized equipment and can damage the pore surface.

Purpose of the Study:

  • To fabricate stable solid-state nanopores using standard micromachining and Electron Beam Induced Deposition (EBID).
  • To investigate the use of EBID with a silicon oxide precursor for tuning nanopore surface properties.
  • To develop a model for estimating nanopore surface charge and assess its stability.

Main Methods:

  • Fabrication of nanopores using standard micromachining techniques.
  • Surface modification of nanopores using Electron Beam Induced Deposition (EBID) with a silicon oxide precursor.
  • Development and application of a simple model to estimate surface charge.

Main Results:

  • Successfully fabricated nanopores using combined micromachining and EBID techniques.
  • Demonstrated that EBID with silicon oxide precursor can effectively tune the nanopore surface properties.
  • Showed that the surface charge of the modified nanopores remains stable across a wide range of concentrations.

Conclusions:

  • Electron Beam Induced Deposition (EBID) is a viable method for tuning solid-state nanopore surfaces.
  • This approach offers a stable and controllable surface charge, crucial for applications like biomolecule detection.
  • The developed fabrication and characterization methods provide a pathway for creating advanced nanopore sensing devices.