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Updated: Jun 10, 2026

09:45
Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds
Published on: December 2, 2013
Vapor-liquid-solid growth of silicon nanowires using organosilane as precursor
Hong-Jie Yang1, Fang-Wei Yuan, Hsing-Yu Tuan
1Department of Chemical Engineering, National Tsing Hua University, 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013, ROC.
Abstract:
Utilizing monophenylsilane as the precursor and liquid injection chemical vapor deposition (LICVD) as the fabrication method offers a novel synthetic approach for the facile, ambient pressure, and continuous vapor-liquid-solid (VLS) synthesis of high quality Si nanowires.

