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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

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Published on: January 27, 2017

Single-step replication of a highly integrated PDMS optofluidic analysis system.

Martin Amberg¹, Sebastian Stoebenau, Stefan Sinzinger

¹Fachgebiet Technische Optik, Technische Universität Ilmenau, 98693 Ilmenau, Germany.

|August 3, 2010

Summary

Researchers developed an integrated optofluidic system using micromilling and polydimethylsiloxane (PDMS). This novel system enables laser-based 3D optical manipulation within well-defined PDMS channels for advanced optical trapping applications.

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Area of Science:

Optofluidics
Microfabrication
Optical Manipulation

Background:

Micromilling enables fabrication of high-quality optical surfaces.
Optofluidic systems integrate fluidics and optics on a microscale.
Polydimethylsiloxane (PDMS) is a versatile material for microfluidic devices.

Purpose of the Study:

To present a highly integrated optofluidic system fabricated using micromilling.
To demonstrate laser-based 3D optical manipulation within the system.
To explore the use of PDMS as a channel wall in optical trapping setups.

Main Methods:

Replication of a micromilled polymethyl methacrylate master mold into PDMS in a single step.
Fabrication of integrated reservoirs, channel systems, and optical interconnect surfaces.
Utilizing laser-based optical trapping for 3D manipulation.

Main Results:

Successful fabrication of an integrated optofluidic system from PDMS.
Demonstration of laser-based 3D optical manipulation within the PDMS system.
First-time use of a PDMS membrane as a defined channel wall for optical trapping.

Conclusions:

Micromilling is effective for creating high-quality optofluidic systems.
The developed PDMS optofluidic system is suitable for 3D optical manipulation.
PDMS membranes can serve as well-defined channel walls in optical trapping configurations.