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Updated: Jun 10, 2026

Experiments on Ultrasonic Lubrication Using a Piezoelectrically-assisted Tribometer and Optical Profilometer
Published on: September 28, 2015
A piezoelectric ultrasonic linear micromotor using a slotted stator
Cheol-Ho Yun1, Brett Watson, James Friend
1Micro/Nanophysics Research Laboratory, Department of Mechanical Engineering, Monash University, Clayton, Victoria, Australia.
A novel ultrasonic micro linear motor design enhances microrobotics and biomedical applications. Optimized slot dimensions improve performance, achieving high velocity and force for precise end-effect devices.
Area of Science:
- Robotics and Mechatronics
- Biomedical Engineering
- Materials Science
Background:
- Microrobotics and biomedical devices require precise, high-performance actuators.
- Existing ultrasonic motors face challenges in efficiency and miniaturization.
- Novel stator designs are crucial for advancing micro-scale motion control.
Purpose of the Study:
- To propose and design a novel ultrasonic micro linear motor utilizing longitudinal and bending modes.
- To investigate the role of a unique stator slot structure in optimizing motor performance.
- To enhance the suitability of ultrasonic motors for microrobotic and biomedical end-effect applications.
Main Methods:
- Design of a bar-type stator with a length-wise rectangular slot.
- Utilizing finite element analysis (FEA) to determine optimal slot dimensions.
- Experimental fabrication and testing of a prototype ultrasonic micro linear motor.
Main Results:
- The optimized slot design effectively tuned resonance frequencies and reduced unwanted displacement.
- The prototype motor (1.6 g) achieved a maximum velocity of 1.12 m/s and a maximum force of 3.4 N.
- A peak mechanical output power of 1.1 W was recorded, with a power-to-weight ratio of 688 W/kg.
Conclusions:
- The novel ultrasonic micro linear motor design demonstrates significant performance improvements.
- The slot structure is critical for enhancing vibration mode control and reducing coupling displacement.
- This motor shows great potential for advanced microrobotic and biomedical end-effect devices.
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