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Updated: Jun 10, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles
1School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA. yoav.linzon@cornell.edu
Abstract:
Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.
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