Fabrication and Characterization of Individually Controlled Multi-Pixel Carbon Nanotube Cathode Array Chip for...

We report here the development of a new carbon nanotube (CNT) field emission multi-pixel cathode array chip, a vital component for the multi-pixel beam x-ray micro-radiotherapy (micro-RT) system under development in our group for cancer research. The CNT field emission cathode array chip has up to 25 (5 × 5) individually addressable cathode pixels, each 1 mm in diameter and with center-to-center distance of 2 mm. The fabrication is a two-step process: first a Cr/Cu electrical contact was fabricated on Si substrates with a 5 microm SiO(2) dielectric layer using photolithography; and second the CNTs were selectively deposited on 1 mm-diameter predefined Cr/Cu contact dots by using a combined photolithography/electrophoresis deposition technique. The electron pixel beams produced from the multi-pixel array chips are uniform and individually controllable. Each pixel beam is expected to generate a dose rate in the order of 100 cGy/min based on our Monte Carlo simulations.