Three-dimensional (BiY)(3)Fe(5)O(12) waveguide with a load layer made of SiO(2)

We have developed a loaded (BiY)(3)Fe(5)O(12) waveguide for integrated magnetooptic devices. The load layer made of SiO(2) was fabricated with a reactive ion etching using CHF(3) gas. The waveguiding loss was measured by the streak method and by the cutback method. The measured values were <7 cm(-1), and the waveguiding loss caused by the lateral confinement was deduced to <1 cm(-1).