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Enhanced angular current intensity from Schottky emitters.

S Fujita¹, T R C Wells, W Ushio

¹Production/Design Technology Center, Shimadzu Corporation, 1, Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511, Japan. fujita@shimadzu.co.jp

Journal of Microscopy

|August 13, 2010

Summary

This summary is machine-generated.

Schottky emitters have low angular current intensity, limiting their use. Scaling the emitter tip radius significantly enhanced angular intensity, enabling high beam currents for electron probe systems.

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Area of Science:

Materials Science
Physics
Electron Optics

Background:

Schottky emitters offer high brightness but suffer from low angular current intensity compared to thermionic cathodes.
This limitation restricts their application in systems demanding high beam currents.

Purpose of the Study:

To enhance the angular current intensity of Schottky emitters.
To overcome the limitations of current Schottky emitter technology for high-beam-current applications.

Main Methods:

Investigated two strategies: increasing extraction field and scaling emitter tip radius.
Observed tip shape transformation and edge emission under high fields.
Exploited the relationship between angular intensity and electron gun focal length, influenced by tip radius.

Main Results:

Higher extraction fields led to undesirable emission from facet edges.
Scaling the emitter tip radius successfully increased angular current intensity.
Achieved high angular current intensity (J(Omega) ≈ 1.5 mA sr⁻¹).

Conclusions:

Scaling the emitter tip radius is an effective method to boost Schottky emitter angular intensity.
The enhanced emitter achieved microampere beam currents with submicron resolution in electron probe systems.