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Updated: Jun 10, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
High-speed cycloid-scan atomic force microscopy
Y K Yong1, S O R Moheimani, I R Petersen
1School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW, Australia. yuenkuan.yong@newcastle.edu.au
Abstract:
A key hurdle in achieving high scan speeds in atomic force microscopes is that the probe is required to be scanned over the sample in a zig-zag raster pattern. The fast axis of the AFM scanner must track a signal that contains frequencies beyond its mechanical bandwidth. Consequently, fast raster scans generate distortions in the resulting image. We propose a smooth cycloid-like scan pattern that allows us to achieve scan speeds much higher than a raster scan. We illustrate how the proposed method can be implemented on a commercial AFM with minimal modifications.
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