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Updated: Jun 10, 2026

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Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
Published on: June 12, 2018
Two-dimensional patterns for optical alignment
Applied Optics
|August 19, 2010
Abstract:
Two-dimensional patterns that have properties suited for optical alignment have been constructed from one-dimensional binary Barker codes. Applications include automated alignment of masks with patterns in photolithography.
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