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$Synchrotron X-ray Microdiffraction and Fluorescence Imaging of Mineral and Rock Samples$

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Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques.

R D Jacobson, S R Wilson, G A Al-Jumaily

|August 20, 2010

Summary

Angle-resolved scatter measurements provide accurate rms roughness values for various materials. This technique offers a valuable alternative to traditional scatter and profiling instruments for surface characterization.

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Area of Science:

Surface metrology
Optical physics
Materials science

Background:

Characterizing surface roughness is crucial for optical and mechanical applications.
Traditional methods like total integrated scatter and profilers have limitations.
Understanding scatter phenomena is key to precise surface analysis.

Purpose of the Study:

To describe the theory and measurement of angle-resolved scatter (ARS).
To compare ARS-derived root-mean-square (rms) roughness values with other instruments.
To analyze the impact of instrument differences on roughness measurements.

Main Methods:

Utilizing angle-resolved scatter (ARS) for surface roughness measurement.
Comparing ARS data with results from total integrated scatter (TIS) instruments.
Cross-validating with optical and mechanical profilers.
Analyzing differences in spatial frequency bandwidths and modulation transfer functions (MTFs).

Main Results:

ARS measurements yielded comparable rms roughness values for four distinct materials.
Discrepancies between ARS and other methods were observed and analyzed.
Differences in spatial frequency bandwidth and MTF influenced measurement outcomes.
ARS demonstrated effectiveness in characterizing surface topography.

Conclusions:

Angle-resolved scatter is a viable technique for accurate rms roughness determination.
Instrument-specific characteristics significantly impact surface metrology results.
ARS offers complementary information to traditional surface characterization tools.
Further investigation into instrument transfer functions is warranted for precise comparison.