Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing
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Published on: February 12, 2014
Axel Wiegmann1, Michael Schulz, Clemens Elster
1Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany. axel.wiegmann@ptb.de
Abstract:
We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly.
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