Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing

Axel Wiegmann1, Michael Schulz, Clemens Elster

  • 1Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany. axel.wiegmann@ptb.de

Optics Express
|August 20, 2010
PubMed
Summary

This study introduces a novel method to improve lateral resolution in multi-sensor scanning profile measurements. Non-equidistant sensor spacing was found to significantly enhance measurement accuracy and detail.

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