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Published on: July 28, 2020
Measuring residual stress of anisotropic thin film by fast Fourier transform
1Department of Electrical Engineering, Feng Chia University, Taichung, Taiwan. cltien@fcu.edu.tw
Abstract:
A new method for the measurement of anisotropic stress in thin films based on 2-D fast Fourier transform (FFT) is presented. A modified Twyman-Green interferometer was used for surface topography measurement. A fringe normalization technique was also used to improve the phase extraction technique efficiently. The measurement of anisotropic stress in obliquely deposited MgF(2) thin film was demonstrated.
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Specifically, consider a tetrahedral element where one face, labeled XYZ, is perpendicular to the line OA, and the remaining faces align with the coordinate axes with point O as the origin. At any point, such as point O, the stress tensor can be used to determine the stress...
