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A Multimodal Wide-Field Fourier-Transform Raman Microscope
06:48

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Published on: December 30, 2025

Method of multiple references for 3D imaging with Fourier transform interferometry.

Evan Lally1, Jianmin Gong, Anbo Wang

  • 1Center for Photonics Technology, Bradley Department of Electrical and Computer Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-0111, USA. evlally@vt.edu

Optics Express
|August 20, 2010
PubMed
Summary
This summary is machine-generated.

This study introduces an improved phase referencing method for optical profilometry. The new technique enhances surface error correction and mapping capabilities for complex surfaces and multiple objects.

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Surface Science

Background:

  • Fourier Transform Interferometry (FTI) is a key technique for optical profilometry.
  • Single-reference FTI has limitations in correcting surface errors for steep slopes and discontinuities.
  • Mapping multiple discrete objects with single-reference FTI is challenging.

Purpose of the Study:

  • To present an improved phase referencing technique for optical profilometry.
  • To overcome the limitations of single-reference FTI.
  • To enable accurate surface error correction and multi-object mapping.

Main Methods:

  • Development of the Method of Multiple References (MMR) for phase referencing.
  • Utilizing a lookup table within the MMR algorithm.
  • Implementation and testing on a fiber optic coupler-based FTI system.

Main Results:

  • The Method of Multiple References effectively corrects surface errors for steep slopes and step discontinuities.
  • MMR allows for the mapping of multiple discrete objects from a single image set.
  • Experimental results show a Root Mean Square (RMS) surface error of less than 0.03 mm.

Conclusions:

  • The Method of Multiple References offers significant advantages over single-reference FTI.
  • This technique improves the accuracy and versatility of optical profilometry.
  • The developed algorithm is robust and suitable for complex surface measurements.