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High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator
D Vermeulen1, S Selvaraja, P Verheyen
1Photonics Research Group, Department of Information Technology, Ghent University-imec, B-9000 Ghent, Belgium. Diedrik.Vermeulen@intec.ugent.be
Optics Express
|August 20, 2010
Abstract:
A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200 mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of -1.6 dB and a 3 dB bandwidth of 80 nm.

