Fabrication of membrane-type microvalves in rectangular microfluidic channels via seal photopolymerization

Rectangular fluidic channels have rarely been used in microfluidic devices which use PDMS membrane-type microvalves, since the rectangular channel shape does not perfectly match the round shape of the membrane deformation. We present a polymer sealing method to fabricate PDMS membrane-type microvalves for rectangular microchannels. After fabricating the microfluidic device, photocurable oligomer is introduced into the fluidic channel and gas pressure is applied to the pneumatic channel to deform the membrane. The polymer seal is then locally polymerized by photolithography producing a structure matching the shape of the deformed membrane curvature. We compare the flow leakage between the membrane-type microvalve with and without a polymer seal. We also demonstrate a micropump and droplet generator using this embedded polymer membrane-type microvalve in a rectangular microfluidic channel. This polymeric seal technique enables the use of easily fabricated rectangular channel membrane microvalves with all the functionality of their curved channel counterparts with negligible flow leakage.