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Updated: Jun 9, 2026

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
09:45

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

Published on: June 12, 2018

Aligning lithography on opposite surfaces of a substrate

P N Everett, W F Delaney

    Applied Optics
    |August 31, 2010
    PubMed

    Abstract:

    Equipment has been developed for aligning lithographic features between opposite surfaces of substrates to within 1 microm. It will work with opaque substrates and allows registration to existing features on the other surface.

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