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Updated: Jun 9, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Double V-groove ridge waveguides on a silicon substrate
Abstract:
A new design for fabricating low-loss ridge waveguides by anisotropically etching two parallel V-grooves on a silicon substrate is proposed and demonstrated. Polymethyl methacrylate is used as the waveguide medium, with silicon dioxide and air as the lower and upper cladding, respectively. Because of the smooth sidewalls of the ridge structure, transverse confinement within the double V-groove ridge waveguide, with scattering losses of ~ 1.0 dB/cm are observed.
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