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Effects of phosphor-based LEDs on vertical scanning interferometry.

Wee Keat Chong¹, Xiang Li, Sardha Wijesoma

¹Precision Measurement Group, Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore. wkchong@simtech.a-star.edu.sg

|September 3, 2010

Summary

Phosphor-based LEDs in vertical scanning interferometry alter fringe contrast, reducing measurement repeatability. Constraining the reconstruction algorithm input improves this repeatability.

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Area of Science:

Optical metrology
Interferometry

Background:

High-power phosphor-based LEDs are increasingly used in white-light sources for vertical scanning interferometry.
These LEDs possess a distinct spectrum with two peaks, unlike conventional sources with a single Gaussian peak.

Purpose of the Study:

To investigate the impact of phosphor-based LEDs on vertical scanning interferometry performance.
To address the resulting decrease in measurement repeatability.

Main Methods:

Analysis of fringe contrast function changes due to phosphor-based LED spectra.
Development and demonstration of a modified reconstruction algorithm with input constraints.

Main Results:

The unique spectrum of phosphor-based LEDs significantly alters the fringe contrast function.
This spectral difference leads to a notable decrease in measurement repeatability.
The proposed constrained reconstruction algorithm successfully enhances repeatability.

Conclusions:

Phosphor-based LEDs introduce challenges in vertical scanning interferometry due to spectral differences.
Algorithm modification is crucial for maintaining high measurement repeatability when using these new light sources.