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Updated: Jun 9, 2026

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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Determination of the refractive index of a-Si(1-x)C(x):H thin films from infrared absorption spectra
Applied Optics
|September 8, 2010
Abstract:
The index of refraction of a-Si(1-x)C(x):H thin films obtained by dc magnetron sputtering was determined by means of IR absorption measurements. Structural and compositional changes that take place by increasing x make the film a mixture of different species, giving an effective value of the refractive index.
Keywords:
refractive index measurementthin film characterizationinfrared absorption analysisamorphous silicon-carbon films
