Damage thresholds of (ZrO(2)-Y(2)O(3)/SiO(2) reflectors used for XeCl lasers

An excimer laser reflector at the wavelength of 308 nm (XeCl) consisting of materials of ZrO(2)-Y(2)O(3) and SiO(2) is prepared. The reflectance reaches ~99.5% and the laser-induced damage threshold is raised to ~8.5 J/cm(2). The ZrO(2)-Y(2)O(3) mixture is proven to be a film material with a high laser damage resistance.