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Updated: Jun 9, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Peroxide and superoxide states of adsorbed O(2) on anatase TiO(2) (101) with subsurface defects
Ulrich Aschauer1, Jia Chen, Annabella Selloni
1Department of Chemistry, Princeton University, Frick Laboratory, Princeton, NJ 08544, USA. aschauer@princeton.edu
Abstract:
Density Functional Theory (DFT) calculations within the Generalized Gradient Approximation (GGA) and the GGA + U approach are carried out to investigate the adsorption of O(2) on anatase (101) surfaces having subsurface oxygen vacancies. Our results show that O(2) adsorption is strongly enhanced at sites close to the subsurface defect, whereas dissociation is unfavorable at all sites. The adsorption is accompanied by the transfer of the defect electrons to O(2)-derived electronic states in the anatase surface band gap. Peroxide species (O(2)(2-), O-O = 1.48 Å) are stable when the number of adsorbed O(2) molecules is less or equal the number of defects, whereas superoxide species (O(2)(-), O-O = 1.33 Å) become more favorable at coverages exceeding approximately 1.5 O(2) molecules per oxygen vacancy.
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