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Fabrication of Silica Ultra High Quality Factor Microresonators
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Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Photoresist templates for wafer-scale defect-free evaporative lithography

Xiaosong Tang1, Sean J O'Shea, Ivan U Vakarelski

  • 1Institute of Materials Research and Engineering, Singapore.

Advanced Materials (Deerfield Beach, Fla.)
|September 16, 2010
PubMed
Abstract

No abstract available in PubMed .

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