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A Multimodal Wide-Field Fourier-Transform Raman Microscope
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Multiwavelength (0.45-10.6 µm) angle-resolved scatterometer or how to extend the optical window.

C Amra, D Torricini, P Roche

    Applied Optics
    |September 22, 2010
    PubMed
    Summary

    This study introduces an apparatus for measuring surface microroughness using scattered light across visible and infrared wavelengths. The system provides detailed surface spectra, offering an extended view of polished sample topography.

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    High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

    Published on: September 22, 2017

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Surface Metrology

    Background:

    • Characterizing surface microroughness is crucial for optical component performance.
    • Existing methods may have limitations in wavelength range or spatial resolution.
    • Accurate surface topography analysis requires advanced scattering measurement techniques.

    Purpose of the Study:

    • To describe a novel apparatus for measuring scattered light over a broad wavelength range (0.45-10.6 µm).
    • To analyze the performance and limitations of the experimental setup, including parasitic light, calibration, and dynamic range.
    • To demonstrate the capability of obtaining bidimensional roughness spectra for polished samples.

    Main Methods:

    • Development of an apparatus to record scattered light in whole space.
    • Utilizing visible and infrared wavelengths (0.45-10.6 µm) for measurements.
    • Performing angular measurements at multiple wavelengths to derive roughness spectra.

    Main Results:

    • The apparatus successfully captures scattered light data across a wide spectral range.
    • Bidimensional roughness spectra of polished samples were obtained.
    • Overlap in spectra across different bandwidths allowed for an extended view of surface microroughness.
    • Challenges in mid-infrared measurements, including thermal emission, were analyzed.

    Conclusions:

    • The described apparatus is effective for characterizing surface microroughness over a broad wavelength range.
    • The method provides detailed topographical information through bidimensional roughness spectra.
    • The study highlights the importance of addressing specific challenges for accurate measurements in the mid-infrared spectrum.