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Updated: Jun 8, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

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Precise method of determining systematic errors in phase-shifting interferometry on Fizeau interferences.

|September 22, 2010

Summary

This summary is machine-generated.

Precise step width is crucial for Fizeau phase-stepping interferometry. A new method quantifies and corrects step-width errors, enabling subnanometer topography measurements of Fabry-Perot plates.

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Area of Science:

Optical metrology
Interferometry
Surface characterization

Background:

Fizeau phase-stepping interferometry allows subnanometer resolution for evaluating multiple-beam interferences.
Accurate phase determination relies on precise step width in the four-bucket algorithm (2π/4).
Deviations in step width can lead to erroneous phase calculations and inaccurate measurements.

Purpose of the Study:

To develop a method for quantitatively determining deviations in step width for Fizeau phase-stepping interferometry.
To investigate the phase dependence of step-width errors.
To enable accurate measurement of Fabry-Perot plate topography.

Main Methods:

Application of a special four-bucket algorithm for phase evaluation.
Quantitative determination of deviations from the exact step width.
Numerical calculations and experimental validation of phase-dependent step-width errors.
Correction of errors using a general four-bucket algorithm.

Main Results:

A method to precisely determine step-width deviations in phase-stepping interferometry is presented.
The phase dependence of step-width errors was numerically calculated and experimentally confirmed.
Step-width errors can be corrected, leading to improved measurement accuracy.
Accurate topography measurements of Fabry-Perot plates (λ/200) are achievable.

Conclusions:

The described method effectively quantifies and corrects step-width errors in Fizeau phase-stepping interferometry.
Precise control and correction of step width are essential for subnanometer metrology.
This technique enhances the accuracy of surface topography measurements for optical components like Fabry-Perot plates.