Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Area of Science:

• Plasma Physics
• Laser Technology
• Materials Science

Background:

• High-repetition-rate laser systems require efficient and clean target delivery.
• Plasma debris generated from laser-target interactions can damage sensitive equipment.
• Existing target delivery methods may not meet the demands of advanced laser plasma sources.

Purpose of the Study:

• To develop and characterize a prototype high-speed tape transport system for laser plasma sources.
• To mitigate plasma debris by employing thin-film targets on a Mylar backing.
• To enable high laser repetition rates through rapid and reliable target delivery.

Main Methods:

• Construction of a prototype tape transport mechanism.
• Utilizing thin films (1000-5000 Å) of target material supported by Mylar tape.
• Implementing a transport velocity of up to 356 cm/s.
• Designing the system for full vacuum compatibility with isolation capabilities for tape replacement.

Main Results:

• The tape transport system successfully transports thin target films to the laser focal volume.
• The system operates at speeds supporting 1 kHz laser repetition rates.
• Plasma debris reduction is achieved through the use of thin-film targets.
• The transport is vacuum compatible and allows for safe tape reel replacement.

Conclusions:

• The prototype high-speed tape transport is a viable solution for high-repetition-rate laser plasma sources.
• The system effectively addresses the challenge of plasma debris.
• The developed transport enhances the operational efficiency and reliability of laser plasma experiments.