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Updated: Jun 8, 2026

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
Recent advances in multilayer mirror technology enable soft-x-ray projection lithography (SXPL). High reflectivity Mo/Si multilayers achieve 66% normal-incidence reflectivity, meeting SXPL throughput needs.
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