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Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment

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Possible damage mechanism of the dielectric coatings for a KrF laser

H L Gao, N Y Wang

|September 22, 2010

Abstract:

We discuss the fracture of dielectric coatings during the irradiation of a high-power (10(8-9) W/cm(2)) KrF laser by analyzing the thermal stress distribution within the coatings. It is shown that it is the compressive stresses perpendicular to the coating surface that make the optical coatings crack.

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