X-ray Imaging
Phase Contrast and Differential Interference Contrast Microscopy
Super-resolution Fluorescence Microscopy
Confocal Fluorescence Microscopy
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Updated: Jun 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Diling Zhu1, Manuel Guizar-Sicairos, Benny Wu
1Department of Applied Physics, Stanford University, Stanford, California, USA. dlzhu@stanford.edu
We developed a new soft x-ray imaging method using differential holographic encoding. This technique achieves 16 nm resolution, surpassing existing methods while remaining simple and maintaining signal quality.
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