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Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats &amp; Spheres
13:07

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Establishing a flatness standard.

K E Elssner, A Vogel, J Grzanna

    Applied Optics
    |October 2, 2010
    PubMed
    Summary
    This summary is machine-generated.

    This study refines the three-plate rotation method for precise flatness standards. The new Fizeau interferometer achieves high accuracy in absolute flatness testing of optical flats.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Metrology

    Background:

    • Establishing accurate flatness standards is crucial for optical component manufacturing.
    • Existing methods for absolute flatness testing have limitations in precision and scope.
    • The three-plate rotation method offers a robust approach to absolute surface testing.

    Purpose of the Study:

    • To further develop and validate the three-plate rotation method for establishing flatness standards.
    • To introduce a specialized phase-stepping Fizeau interferometer for enhanced absolute flatness testing.
    • To assess the accuracy and feasibility of the improved method for optical flats up to 200 mm in diameter.

    Main Methods:

    • Utilized a further-developed three-plate rotation method for absolute testing of optical flats.
    • Employed a custom-built phase-stepping Fizeau interferometer capable of testing flats up to 200 mm.
    • Collected flatness deviation data at 500-600 points per plate.

    Main Results:

    • Achieved a mean error between 0.002 and 0.003λ (where λ = 632.8 nm) in absolute flatness deviation determination.
    • Demonstrated the capability of the system to measure numerous points on each optical flat.
    • Identified critical experimental conditions related to thermal and mechanical stability.

    Conclusions:

    • The enhanced three-plate rotation method, coupled with the specialized Fizeau interferometer, provides a highly accurate means for establishing flatness standards.
    • The method is suitable for absolute flatness testing of optical flats within the tested diameter range.
    • Maintaining stringent thermal and mechanical stability is essential for achieving optimal measurement accuracy.