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High speed silicon optical modulator with self aligned fabrication process.

D J Thomson1, F Y Gardes, G T Reed

  • 1Advanced Technology Institute, University of Surrey, Guildford, Surrey, UK. d.thomson@surrey.ac.uk

Optics Express
|October 14, 2010
PubMed
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A novel self-aligned fabrication process for silicon optical modulators ensures high yield and repeatable performance. This method addresses key challenges in silicon photonics commercialization, enabling high-speed data transmission.

Area of Science:

  • Photonics and semiconductor device fabrication.
  • Integrated optics and optoelectronics.

Background:

  • Commercialization of silicon photonic devices demands high-yield, repeatable fabrication processes.
  • Precise alignment of device elements is critical for performance and to prevent failure.
  • Existing fabrication methods face challenges in achieving consistent device performance.

Purpose of the Study:

  • To introduce a new design for a high-speed carrier depletion silicon optical modulator.
  • To implement a self-aligned fabrication process for the pn junction in silicon optical modulators.
  • To address fabrication challenges and improve performance repeatability in silicon photonics.

Main Methods:

  • Development of a novel silicon optical modulator design.
  • Utilisation of a self-aligned fabrication process to create the pn junction.

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  • Experimental fabrication run and device testing.

    • Main Results:

    • Demonstration of a 6 dB modulation depth.
    • Achieved data transmission rate of 10 Gbit/s.
    • Device performance was consistent from an initial fabrication run using the new process.

    Conclusions:

    • The self-aligned fabrication process is effective for producing high-speed silicon optical modulators.
    • This approach offers a viable solution for the commercialization of silicon photonics.
    • The demonstrated performance indicates potential for high-yield, repeatable manufacturing.