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Fabrication of aspherical SU-8 microlens array utilizing novel stamping process and electro-static pulling method.

Shu-Ming Kuo1, Che-Hsin Lin

  • 1Department of Mechanical and Electro-mechanical Engineering, National Sun Yat-sen University, 804, Kaohsiung, Taiwan.

Optics Express
|October 14, 2010
PubMed
Summary

This study introduces a novel method for creating tunable aspherical SU-8 microlens arrays. The technique uses soft stamping and electrostatic pulling for high-quality optical components.

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Area of Science:

  • Microfabrication
  • Optical Engineering
  • Materials Science

Background:

  • Aspherical microlens arrays are crucial for advanced optical systems.
  • Existing fabrication methods can be complex and lack tunability.

Purpose of the Study:

  • To develop a simple, novel, and efficient method for fabricating aspherical SU-8 microlens arrays.
  • To achieve tunable focal lengths and high optical quality.

Main Methods:

  • Fabrication of an SU-8 stamp with a micro-nozzle array on a glass substrate.
  • Utilizing a soft SU-8 stamping process combined with an electrostatic pulling method.
  • Employing dose-controlled exposure for stamp fabrication.

Main Results:

  • Successfully fabricated aspherical SU-8 microlens arrays with diameters from 20 to 500 μm.
  • Achieved low surface roughness (Ra = 3.84 nm) and high dimensional uniformity (< 5% variation).
  • Demonstrated tunable focal lengths for the microlens arrays.

Conclusions:

  • The proposed method is a simple and efficient approach for producing high-quality aspherical microlens arrays.
  • The technique offers tunable focal lengths, expanding applications in optics.
  • The results confirm the feasibility and optical quality of the fabricated microlenses.