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Updated: Jun 8, 2026
Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Glass-embedded two-dimensional silicon photonic crystal devices with a broad bandwidth waveguide and a high quality
Seung-Woo Jeon1, Jin-Kyu Han, Bong-Shik Song
1School of Information and Communication Engineering, Sungkyunkwan University, Jangan-Gu, Suwon Gyeonggi-do 440-746, Korea.
Abstract:
To enhance the mechanical stability of a two-dimensional photonic crystal slab structure and maintain its excellent performance, we designed a glass-embedded silicon photonic crystal device consisting of a broad bandwidth waveguide and a nanocavity with a high quality (Q) factor, and then fabricated the structure using spin-on glass (SOG). Furthermore, we showed that the refractive index of the SOG could be tuned from 1.37 to 1.57 by varying the curing temperature of the SOG. Finally, we demonstrated a glass-embedded heterostructured cavity with an ultrahigh Q factor of 160,000 by adjusting the refractive index of the SOG.
