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Updated: Jun 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Digital holographic interferometer using simultaneously three lasers and a single monochrome sensor for 3D
Tonatiuh Saucedo-A1, M H De la Torre-Ibarra, F Mendoza Santoyo
1Universidad Autónoma de Zacatecas, Calzada Solidaridad Esquina con Paseo la Bufa S/N, Zacatecas, México. tsaucedo@fisica.uaz.edu.mx
Abstract:
The use of digital holographic interferometry for 3D measurements using simultaneously three illumination directions was demonstrated by Saucedo et al. (Optics Express 14(4) 2006). The technique records two consecutive images where each one contains three holograms in it, e.g., one before the deformation and one after the deformation. A short coherence length laser must be used to obtain the simultaneous 3D information from the same laser source. In this manuscript we present an extension of this technique now illuminating simultaneously with three different lasers at 458, 532 and 633 nm, and using only one high resolution monochrome CMOS sensor. This new configuration gives the opportunity to use long coherence length lasers allowing the measurement of large object areas. A series of digital holographic interferograms are recorded and the information corresponding to each laser is isolated in the Fourier spectral domain where the corresponding phase difference is calculated. Experimental results render the orthogonal displacement components u, v and w during a simple load deformation.
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